The PICOSUN™ P-1000 ALD system is designed for batch coating of various 3D objects such as mechanical parts, glass or metal sheets, coins, jewelry, or medical implants.

Technical Features

Typical substrate size and type

• Small and large 3D items (e.g. mechanical parts, glass or metal sheets, coins, jewelry, medical implants)

Processing temperature

• 50 – 400°C

Typical processes

• Al₂O₃, ZnO, TiO₂

Substrate loading

• Manual loading with loading accessory (e.g. forklift cart)

Precursors

• Liquid, solid, gas, ozone
• Level sensors, cleaning and refill service
• Up to 10 sources with 6 separate inlets

The PICOSUN™ P-1000 ALD system is designed for batch processing of various 3-dimensional objects such as mechanical parts, glass or metal sheets, coins, jewelry, or medical implants in a production environment. The main applications include various passivation and barrier layers to significantly improve the performance and lifetime of the coated items. The PICOSUN™ P-1000 ALD system offers innovative and agile design to enable the highest quality ALD depositions with excellent uniformity, maximum yields, minimum system downtime and low cost-of-ownership with production-proven processes.

The reliable, fast, and easy to maintain PICOSUN™ P-1000 ALD system represents the cutting-edge of industrial ALD.